放置方向和沉积时间对 Ti 大颗粒分布状态的影响

魏永辉, 田修波, 魏永强, 蒋志强

Influence of Placement Orientation and Deposition Time on the Morphology and Distribution of Ti Macroparticles

WEI Yong-hui, TIAN Xiu-bo, WEI Yong-qiang, JIANG Zhi-qiang

表面技术 . 2014, (5): 6 -10,41 .