N2/Ar流量比对TiZrN/TiN纳米多层薄膜微观结构和性能的影响
魏永强, 张华森, 张晓晓, 顾艳阳, 刘畅, 吕怿东, 韦春贝, 钟素娟
Effects of N2/Ar Flow Ratio on the Microstructure and Properties of TiZrN/TiN Nano-multilayer Films
WEI Yongqiang, ZHANG Huasen, ZHANG Xiaoxiao, GU Yanyang, LIU Chang, LYU Yidong, WEI Chunbei, ZHONG Sujuan
表面技术
.
2025, (14): 92
-104
.
DOI: 10.16490/j.cnki.issn.1001-3660.2025.14.009
渝公网安备 50010702501715号 渝ICP备15012534号-3