脉冲偏压占空比对TiN/TiAlN多层薄膜微观结构和硬度的影响

张艳霞, 蒋志强, 文振华, 冯宪章, 魏永强

Effects of Different Pulsed Bias Duty Cycle on the Microstructure and Hardness of TiN / TiAlN Multilayer Coatings

ZHANG Yan-xia, JING Zhi-qiang, WEN Zhen-hua, FEN Xian-zhang, WEI Yong-qiang

表面技术 . 2014, (1): 1 -6,39 .