氮化铜薄膜制备中氮气比例对其结构及微观力学性能的影响
龚鹏, 范真, 丁建宁, 程广贵, 袁宁一, 凌智勇
Effect of Nitrogen Partial Pressure on the Structure and Micro-mechanical Properties of Cu3N Films
GONG Peng, FAN Zhen, DING Jian-ning, CHENG Guang-gui, YUAN Ning-yi, LING Zhi-yong
表面技术
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2013, (5): 15
-18,31
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