非平衡磁控溅射沉积不同成分 Ti-Ni 合金薄膜的伪弹性研究

徐雪波, 贺耀华, 贺志勇, 鲍明东

Pseudoelasticity Behavior of Ti-Ni Alloy Film Deposited Using Unbalanced Magnetron Sputtering

XU Xue-bo, HE Yao-hua, HE Zhi-yong, BAO Ming-dong

表面技术 . 2013, (4): 28 -31 .