应用非平衡磁控溅射离子镀方法沉积制备了五种不同成分的 Ti-Ni 合金薄膜,并在保护气体条件下于 600 益 进行了晶化退火处理。 分析了薄膜的相结构,测定了薄膜的硬度和弹性模量,并利用纳米压入加载-卸载曲线分析研究了薄膜的伪弹性回复率,讨论了薄膜成分对硬度、弹性模量和伪弹性的影响规律。 结果表明:富 Ni 薄膜的硬度、弹性模量和伪弹性均较高,但含 Ni 量达到一定值后,这些性能指标呈下降趋势。

Five Ti-Ni shape memory alloy films with different composition were deposited using unbalanced magnetron sputter ion plating technique. As-deposited coatings were crystallized by heating to 600 益 at the environment of Ar insert gas.The phase transformation behavior of the fabricated film was investigated. The hardness and Young modulus of films were evaluated. The recoverable energy of films was investigated from the entire loading and unloading process that results into a load-displacement curve automatically. The effect of composition of films on hardness, elastic modulus and pseudoelasticity was discussed. Results indicated that hardness, Young爷 s modulus and pseudoelasticity increased with the rising of atomic percent of Ni in films. But there was a maximum value of those mechanic properties with the increase of Ni percent .