脉冲偏压占空比对TiAlCrN多元复合薄膜微观结构和性能的影响规律
魏永强, 王唯骏, 李永辉, 王道洋, 杨佳乐, 刘畅, 吕怿东, 韦春贝, 钟素娟
Effect of Substrate Pulsed Bias Duty Cycles on the Microstructure and Properties of TiAlCrN Multi-component Composite Films Deposited by Arc Ion Plating
WEI Yongqiang, WANG Weijun, LI Yonghui, WANG Daoyang, YANG Jiale, LIU Chang, LYU Yidong, WEI Chunbei, ZHONG Sujuan
表面技术
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2026, (6): 40
-52
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DOI: 10.16490/j.cnki.issn.1001-3660.2026.06.004
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