脉冲偏压占空比对TiAlCrN多元复合薄膜微观结构和性能的影响规律

魏永强; 王唯骏; 李永辉; 王道洋; 杨佳乐; 刘畅; 吕怿东; 韦春贝; 钟素娟

doi:10.16490/j.cnki.issn.1001-3660.2026.06.004

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表面技术 ›› 2026, Vol. 55 ›› Issue (6) : 40-52. DOI: 10.16490/j.cnki.issn.1001-3660.2026.06.004

腐蚀与防护

脉冲偏压占空比对TiAlCrN多元复合薄膜微观结构和性能的影响规律

魏永强^1,*, 王唯骏¹, 李永辉¹, 王道洋¹, 杨佳乐¹, 刘畅^1,2, 吕怿东^1,3, 韦春贝², 钟素娟³

作者信息 +

Effect of Substrate Pulsed Bias Duty Cycles on the Microstructure and Properties of TiAlCrN Multi-component Composite Films Deposited by Arc Ion Plating

WEI Yongqiang^1,*, WANG Weijun¹, LI Yonghui¹, WANG Daoyang¹, YANG Jiale¹, LIU Chang^1,2, LYU Yidong^1,3, WEI Chunbei², ZHONG Sujuan³

Author information +

文章历史 +

摘要

目的为提升M2高速钢材料的表面性能,研究脉冲偏压占空比对TiAlCrN多元复合薄膜微观结构和性能的影响规律。方法采用电弧离子镀方法,在M2高速钢表面制备TiAlCrN多元复合薄膜,再通过多种检测表征方法,探究脉冲偏压占空比对TiAlCrN多元复合薄膜微观结构与性能的影响规律。结果随脉冲偏压占空比的增加,TiAlCrN薄膜表面大颗粒数量整体呈递减的变化趋势;薄膜晶面择优取向发生明显转变,占空比在20%及以下时为(200)晶面,占空比在30%及以上时转变为(111)晶面。当脉冲偏压占空比为10%时,薄膜中Al元素含量（原子数分数）达到峰值21.37%,平均晶粒尺寸最大为6.17 nm,薄膜硬度达到最大值2 381HV,薄膜的结合力最优为74 N;当脉冲偏压占空比为20%时,平均摩擦系数降至最小值0.84;占空比为40%时薄膜中Cr元素含量（原子数分数）最高为22.37%,Cr对薄膜晶粒的细化作用最显著,使薄膜平均晶粒尺寸最小为2.86 nm,致密的薄膜结构可有效阻隔腐蚀介质渗透,自腐蚀电位达到最高值-0.39 V (vs. SCE)。相较于M2高速钢基体,TiAlCrN多元复合薄膜的硬度、耐腐蚀及摩擦磨损性能均实现显著提升。TiAlCrN多元复合薄膜在刀具与模具性能提升方面具有良好的应用前景,研究结果为硬质薄膜沉积工艺优化提供了实验依据。结论 TiAlCrN多元复合薄膜能显著提升高速钢基体的性能,通过调节脉冲偏压占空比可优化其结构与综合性能,其中脉冲偏压占空比为10%时薄膜硬度最高,脉冲偏压占空比为40%时薄膜耐腐蚀和抗摩擦磨损性能最优。

Abstract

To systematically investigate the effect of the pulsed bias duty cycle, the work aims to deposit TiAlCrN multi-component composite films on the M2 high-speed steel via arc ion plating. The microstructure was characterized by scanning electron microscopy (SEM). Phase identification and texture analysis were performed through X-ray diffraction (XRD). Elemental composition was quantified by energy dispersive spectroscopy (EDS). Microhardness was measured with a Vickers microhardness tester. Adhesion was evaluated via scratch tests on a multifunctional surface properties tester. Tribological performance was assessed with a pin-on-disk testing machine and electrochemical behavior was examined through potentiodynamic polarization tests. Increasing the pulsed bias duty cycle enhanced the ion bombardment intensity over a given period, which reduced the macroparticles. As the pulsed bias duty cycle increased from 10% to 50%, the amount of macroparticles decreased from 547 to 312 due to the stronger repulsive force from the substrate bias. This amount reduction of macroparticles contributed to a lower coefficient of friction and better surface quality. At the pulsed bias duty cycle below 20%, the TiAlCrN multi-component composite films displayed a preferred orientation along the (200) plane. While the pulsed bias duty cycle increased more than 30%, the ion flux density increased and the pull up time of ion flux prolonged, which accelerated TiAlCrN multi-component composite film deposition and led to the internal stress rise. Meanwhile, the strain energy minimization dominated the TiAlCrN multi-component composite film growth and the preferred orientation transited from (200) to (111). At a pulsed bias duty cycle of 10%, the Al content reached a maximum of 21.37at.%, the average grain size and hardness of TiAlCrN multi-component composite films reached the maximum values of 6.17 nm and 2 381HV, respectively. This was attributed to the synergistic effects of solid solution strengthening and the reverse Hall-Petch effect. When the grain size decreased to a critical value, the hardness trend was consistent with the reverse Hall-Petch effect. The relatively coarser grain size corresponded to the maximum hardness. The reduction of strain energy enabled the TiAlCrN multi-component composite film to achieve optimal adhesion 74 N. At a pulsed bias duty cycle of 20%, during sliding friction test process, minimal film delamination limited the wear debris generation, which decreased the average coefficient of friction to 0.84. With the pulsed bias duty cycle increasing to 40%, the Cr element content of TiAlCrN multi-component composite films reached the highest value of 22.37at.%, which promoted the grain refinement and the average grain size reached to the smallest 2.86 nm. This dense microstructure effectively impeded the penetration of corrosive medium. The TiAlCrN multi-component composite film had superior corrosion resistance and the corrosion potential reached to -0.39 V(vs. SCE). With the pulsed bias duty cycle increasing to 50%, the time-dependent enhancement of ion attraction promoted film growth and increased thickness, but the excessive ion bombardment raised internal stress and severely degraded the adhesion to 28 N. Meanwhile, the adhesion reduction of the TiAlCrN multi-component composite film induced the film delamination and accelerated debris generation during the friction process and the coefficient of friction reached to the maximum 0.91. Compared with the uncoated M2 high-speed steel substrate, the TiAlCrN multi-component composite films demonstrated significantly enhanced hardness, superior corrosion resistance and improved tribological performance. These research results provide experimental evidence and key deposition process for optimizing arc ion plating processes. These findings demonstrate the considerable potential of TiAlCrN films for enhancing the performance and durability of cutting tools and molds in advanced manufacturing applications.

导出引用

魏永强, 王唯骏, 李永辉, 王道洋, 杨佳乐, 刘畅, 吕怿东, 韦春贝, 钟素娟. 脉冲偏压占空比对TiAlCrN多元复合薄膜微观结构和性能的影响规律[J]. 表面技术. 2026, 55(6): 40-52

WEI Yongqiang, WANG Weijun, LI Yonghui, WANG Daoyang, YANG Jiale, LIU Chang, LYU Yidong, WEI Chunbei, ZHONG Sujuan. Effect of Substrate Pulsed Bias Duty Cycles on the Microstructure and Properties of TiAlCrN Multi-component Composite Films Deposited by Arc Ion Plating[J]. Surface Technology. 2026, 55(6): 40-52

中图分类号： TG174.4

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基金

国家自然科学基金（51401182）; 中国国家留学基金项目（CSC202108410274）; 河南省自然科学基金项目（242300420053）; 河南省高层次人才国际化培养资助项目; 广东省基础与应用基础研究基金项目（2024A1515010753）; 新型钎焊材料与技术国家重点实验室开放课题项目（SKLABFMT-2023-09）; 郑州航空工业管理学院科研团队（23ZHTD01010）; 郑州航空工业管理学院研究生教育创新计划项目（2025CX88）