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Effects of Working Pressure on Mo Films by Direct Current Magnetron Sputtering

XING Pi-feng, ZHENG Feng-cheng, LOU Jian-she, WAN Xiao-bo, YI Tai-min, YANG Meng-sheng, XU Dao-jin, WANG Kun-shu, KONG Ze-bin, ZHU Wei-ming

表面技术 . 2013, (1): 71 -74 .