溅射技术对TiN涂层结构和力学性能的影响
谷佳宾, 李建勇, 李刘合, 金杰, 张海鹏
Effect of Sputtering Technology on Microstructure and Mechanical Properties of TiN Coatings
GU Jia-bin, LI Jian-yong, LI Liu-he, JIN Jie, ZHANG Hai-peng
表面技术
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2023, (9): 160
-169, 188
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DOI: 10.16490/j.cnki.issn.1001-3660.2023.09.012