目的 沉积条件对TiN涂层的组织结构和力学性能有着至关重要的影响，而溅射技术又决定了涂层的沉积条件，探究不同溅射技术对TiN涂层的微观组织结构和性能的影响，提高TiN涂层的力学性能和高温摩擦磨损性能。方法 采用不同的溅射技术(dcMS、HiPMS、Hybrid)在M2高速钢表面沉积TiN涂层，利用扫描电子显微镜(SEM)、X射线衍射仪(XRD)、sin²ψ法、纳米压痕仪、洛氏压痕法、划痕法和CSM球盘式摩擦试验机分别测试了TiN涂层的组织结构特征、沉积速率、残余应力、纳米硬度、膜基结合力和高温摩擦磨损性能。结果 不同溅射技术制备的TiN涂层均为柱状晶结构和TiN (111)择优取向。HiPIMS-TiN涂层具有最高的纳米硬度(29.7 GPa)和最低的膜基结合力(HF2)，而Hybrid-TiN涂层呈现出最小的残余应力、高沉积速率和高膜基结合力，其膜基结合力达到HF1级，临界载荷(Lc2)达到82.5 N。不同溅射技术制备的TiN涂层的摩擦因数均随着温度的升高而降低，在500 ℃时，TiN涂层的摩擦因数约为0.53。TiN涂层的磨损率随着温度的升高而升高，在不同温度下，Hybrid-TiN涂层均呈现出最低的磨损率。结论 溅射技术对TiN涂层的组织结构和力学性能有着重要影响，Hybrid-TiN涂层呈现出最优的综合力学性能和高温摩擦磨损性能。

The microstructure properties of TiN coating are mainly affected by the deposition conditions, which in turn are affected by the sputtering technology. The proper use of the sputtering technology allows to control the state of ion bombardment during coating growth and tailors the crystal structure, thereby improving the properties of TiN coating. Therefore, TiN coatings were deposited on the M2 high-speed steel by different sputtering technologies (dcMS, HiPMS, and Hybrid) in this work. The effects of different sputtering technologies on the microstructure, mechanical properties, and high temperature wear properties of TiN coatings were investigated.