负偏压对电弧离子镀复合TiAlN 薄膜的影响

黄美东, 许世鹏, 刘野, 薛利, 潘玉鹏, 范喜迎

Influence of Negative Bias on TiAlN Films by Arc Ion Plating

HUANG Mei-dong, XU Shi-peng, LIU Ye, XUE Li, PAN Yu-peng, FAN Xi-ying

表面技术 . 2012, (6): 1 -3,6 .