氮氩流量比对磁控溅射CrAgCeN涂层摩擦学性能的影响

畅为航, 蔡海潮, 薛玉君, 雷贤卿, 李航

Effect of Nitrogen-to-argon Flow Ratio on Properties of CrAgCeN Coating by Magnetron Sputtering

CHANG Wei-hang, CAI Hai-chao, XUE Yu-jun, LEI Xian-qing, LI Hang

表面技术 . 2022, (8): 262 -271 . DOI: 10.16490/j.cnki.issn.1001-3660.2022.08.022