目的 研究不同氮氩流量比对磁控溅射制备CrAgCeN涂层微观组织结构和摩擦学性能的影响。方法 采用扫描电子显微镜、X射线衍射仪对涂层表面形貌、成分和微观组织进行分析。采用纳米压痕仪、球盘式摩擦磨损试验机和白光干涉三维形貌仪，测试涂层的力学性能和摩擦学性能。结果 在给定的氮氩流量比下，CrAgCeN涂层主要有CrN、Cr2N、Ag、AgN3和Ce相构成，引入Ce、Ag可改变组织结构，随着氮氩流量比的增加，CrAgCeN涂层表面形貌由三角锥状转变为球状，在氮氩流量比为1.5时，涂层组织更加致密。涂层硬度和弹性模量随着氮氩流量比的增加呈现先升高后降低的趋势，在氮氩流量比为1.5时，硬度(H)和弹性模量(E)最大，分别为14.1 GPa和213.8 GPa;H/E值最高，为0.066，反映涂层具有较好的抗塑性变形能力。随着氮氩流量比的增加，摩擦因数和磨损率先减小后增大，在氮氩流量比为1.5时，涂层的摩擦因数和磨损率最小，分别为0.381和1.1×10^?6 mm³/(N.m)，相比于氮氩流量比为0.6、1、3时，对磨球磨损表面能谱表明Ce、Ag含量最高，减摩耐磨效应最优，对磨球磨损表面最平整。结论 通过调整氮氩流量比可以获得摩擦磨损性能良好的CrAgCeN涂层。

It is an advanced surface modification technology by magnetron sputtering a several-micron-thick hard ceramic coating, which have been widely used in industry owing to their high hardness and toughness, good oxidation and corrosion resistance, wear resistance, and excellent adhesion to substrates. The coating performance is strongly affected by the deposition parameters such as applied pressure, N2-gas partial pressure, and target power. A change in these parameters may alter the structural and mechanical properties and hence the friction resistance of the coating. The work aims to investigate the effect of nitrogen-to-argon flow ratios on the microstructure and tribological properties of CrAgCeN coatings prepared by magnetron sputtering. The sputtering targets were Cr (99.95%) and CeAg alloy (5:5 Ce:Ag), 304 stainless steel was selected as the substrate. A Cr transition layer was deposited for 20 minutes to improve the adhesion of the coating to the substrate. The main process parameters were set as follows:vacuum pressure was 5×10?4 Pa, deposition temperature was 200 °C, total coating-deposition time was 120 min. The nitrogen-to-argon flow ratio was 0.6, 1, 1.5 and 3. Scanning electron microscopy (SEM) and X-ray diffraction (XRD) were used to characterize the microstructure, composition and crystal structure of the coatings. The mechanical properties and friction and wear properties of the coatings were tested by nano indentation, tribometer and white light interfering profilometer. The wear rates of three tests were averaged to reduce the error, and were used to evaluate the wear performances of the coatings. A well-formed CrAgCeN coating is successfully prepared by a magnetron sputtering system on the surface of 304 steel. The key parameters were set as follows, deposition pressure was 0.6 Pa, DC power was 200 W, RF power was 60 W, N2 flow was 30 mL/min, Ar flow was 20 mL/min. The microstructure of CrAgCeN coatings could be improved by doping Ce. The phases of CrAgCeN coatings, are mainly composed of CrN, Cr2N, Ag, AgN3 and Ce. With the increase of nitrogen-to-argon flow ratios, the surface morphology of coatings changes from triangular cone to sphere, the structure is uniform and dense. When the nitrogen-to-argon flow ratios was 1.5, the H and E of the CrAgCeN coating are maximum, namely 14.1 GPa and 213.8 GP, the friction coefficient of CrAgCeN coating was as low as about 0.381, and the wear rate was as low as 1.1×10?6 mm3/(N.m). The wear mechanism was mild adhesive and small oxidation wear at the nitrogen-to-argon flow ratios of 1.5. The energy spectrum showed that there were Fe, Cr, Ce, Ag and O elements on the surface of the counter-grinding balls, indicating that Cr, Ce and Ag were transferred to the worn surface of counter-faces. The EDS of the worn surface of the counter-grinding balls shows that the content of Ce is the highest, which implied the formation of ceria oxide groups on the surface of the coatings. Ceria groups appearing on the worn surface may perform as a solid lubricant that reduces friction. The lubricant can decrease the interaction forces with the sliding counterpart and contribute to the lowering of friction after the Ce incorporation. At the nitrogen-to-argon flow ratios of 1.5, the effect of antifriction and wear resistance is the outstanding, the worn surface of the counter-grinding balls is the most flat. Amazing friction and wear properties of CrAgCeN coating could be obtained by adjuting appropriate nitrogen and argon flow.