Ag、Cu掺杂MoCN薄膜结构及摩擦性能的研究

范军, 钱建国, 蒲吉斌

Study on the Microstructure and Tribological Properties of Ag, Cu and Ag/Cu Doped MoCN Films

FAN Jun, QIAN Jian-guo, PU Ji-bin

表面技术 . 2021, (11): 260 -269, 286 . DOI: 10.16490/j.cnki.issn.1001-3660.2021.11.027