目的 利用软金属Ag、Cu等改性来提升MoCN薄膜材料的宽温域润滑性能。方法 通过多靶磁控溅射制备了MoCN-X(X=Ag、Cu或Ag-Cu)复合薄膜。采用XRD、SEM、SPM 3种测试方法分析了复合薄膜的微观结构，并利用纳米压痕仪和高温摩擦试验机分别测试了薄膜的常温力学性能和不同温度下的摩擦性能。结果 3种复合薄膜中，MoCN-Ag薄膜表面的粗糙度最低。与MoCN-Cu薄膜相比，MoCN-Ag复合薄膜具有更好的抗氧化能力，在300 ℃下，由于热驱动作用，薄膜表面析出的Ag仅发生部分氧化，在500 ℃下，薄膜表面生成的双金属氧化物(钼酸银)能有效降低薄膜的摩擦系数。在常温下，MoCN-Cu复合薄膜具有很好的抗磨损能力，且和MoCN-Ag具有相近的摩擦系数。MoCN-Ag-Cu复合薄膜的硬度和弹性模量相对于MoCN-Cu均得到提升。在300 ℃下，MoCN-Cu薄膜和MoCN-Ag-Cu复合薄膜的摩擦系数比MoCN-Ag薄膜高。在500 ℃时，3种薄膜的摩擦系数均在0.3左右。常温下，薄膜主要表现为磨粒磨损，而在500 ℃下，薄膜主要是氧化磨损和粘着磨损。结论 软金属Ag和Cu都能在一定程度上改善MoCN薄膜的中温摩擦性能，可以尝试采用Ag和Cu共掺杂的方式降低薄膜的成本。

This paper aims to explore the use of soft metals such as Ag and Cu to effectively improve the lubricating properties of the carbonitride in a wide temperature range. In this paper, the MoCN-X (X=Ag, Cu or Ag-Cu) composite films were prepared by magnetron sputtering. The microstructure of the composite film was analyzed by XRD, SEM, and SPM, and the mechanical and friction properties of the films were tested by the MTS Nano Indenter G200 system and on a ball-on-disk tribometer (THT 1000, Austria), respectively. The results show that among the three composite films, the MoCN-Ag film has the lowest surface roughness. The MoCN-Ag composite film has better oxidation resistance compared with the MoCN-Cu film. The Ag precipitated on the film surface due to thermal drive at 300 ℃ only partially oxidizes, and the bimetallic oxide formed on the film surface at 500 ℃ can effectively reduce the friction coefficient of the MoCN-Ag film. The MoCN-Cu composite film has good wear resistance at room temperature, and has a friction coefficient similar to MoCN-Ag at room temperature. Compared with MoCN-Cu, the hardness and elastic modulus of MoCN-Ag-Cu composite film are improved. The friction coefficient of MoCN-Cu and MoCN-Ag-Cu composite films is higher than that of MoCN-Ag films at 300 ℃. The friction coefficients of the three films are around 0.3 at 500 ℃. These films mainly exhibit abrasive wear at room temperature, while the films are mainly oxidized wear and adhesive wear at 500 ℃. Both the Ag and Cu can improve the medium temperature friction properties of the MoCN film to a certain extent. It’s a good idea to reduce the cost of the film by co-doping Ag and Cu.