氩气流量对非晶碳膜结构及力学和摩擦学性能的影响
冯兴国, 周晖, 张延帅, 郑宇, 张凯锋, 汪科良, 杨拉毛草, 张宝荣, 赵志勇, 郑军, 刘兴光, 郑玉刚
Effects of Argon Flow on Structure, Mechanical and Tribological Properties of Amorphous Carbon Films
FENG Xing-guo, ZHOU Hui, ZHANG Yan-shuai, ZHENG Yu, ZHANG Kai-feng, WANG Ke-liang, YANG La-mao-cao, ZHANG Bao-rong, ZHAO Zhi-yong, ZHENG Jun, LIU Xing-guang, ZHENG Yu-gang
表面技术
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2021, (10): 263
-269
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DOI: 10.16490/j.cnki.issn.1001-3660.2021.10.026
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