目的 提升9Cr18不锈钢表面的耐磨损性能。方法 在不同氩气流量条件下，采用激光引弧磁过滤阴极电弧离子镀制备非晶碳膜。利用拉曼光谱、X射线光电子能谱仪(XPS)和原子力显微镜(AFM)表征薄膜的微观结构和化学态。利用薄膜综合性能测试仪和大气球-盘摩擦试验机，测试薄膜的力学性能和摩擦学性能。结果 拉曼光谱分析表明，随着氩气流量从0 mL/min增大到80 mL/min，ID/IG值从0.62逐渐增大到2.84，而G峰的半高宽随着氩气流量的增大而降低。XPS分析表明，随着氩气流量的增加，薄膜中sp³杂化键含量逐渐降低，氩气流量为0 mL/min时，sp³杂化键的原子数分数为55.1%，氩气流量为80 mL/min时，sp³杂化键的原子数分数降低至31.0%。氩气流量为0 mL/min时，制备的薄膜硬度和弹性模量最大，分别为46.4 GPa和380.5 GPa。不同氩气流量制备的薄膜，其摩擦系数为0.1~0.2，薄膜的磨损率随着氩气流量的增加而增大。结论 氩气流量对非晶碳膜的耐磨性能具有显著的影响，氩气流量为0 mL/min时，所制备的薄膜的磨损率为3.8×10^–17 m³/(m.N)，相较氩气流量为80 mL/min时所制备薄膜的磨损率(1.1×10^–16m³/(m.N))降低了1个数量级，说明其具有优异的耐磨损性能。

This paper aims to improve the wear resistance of 9Cr18 stainless steel. The amorphous carbon films were deposited by pulsed laser-induced cathodic vacuum arc technique with various argon flows. The microstructure and chemical state were characterized by Raman spectroscopy, X-ray photoelectron spectroscopy (XPS) and atomic force microscope (AFM). The mechanical and tribological properties of the films were analyzed by microhardness tester, nano-scratch tester and ball-on-disc friction tester. The Raman spectra showed that the integrated intensity ratio (ID/IG) was increased from 0.62 to 2.84 with increasing argon flow from 0 mL/min to 80 mL/min. The G peak full width at half-maximum (FWHM) was decreased with increasing argon flow. XPS showed that the sp3 content was decreased with increasing argon flow. The sp3 content of the film deposited at 0 mL/min was highest, with a value of 55.1%. As the argon flow at 80 mL/min, the sp3 content reduced to a minimum value of 31.0%. The hardness and modulus were decreased with increasing argon flow. The friction coefficient of the films was between 0.1 and 0.2, and the wear rate was increased with increasing argon flow. The films deposited at 0 mL/min have the minimum wear rate with a value of 3.8×10–17 m3/(m.N), which decrease ten times than the films deposited at 80 mL/min (1.1×10–16 m3/(m.N)), and indicates an excellent wear resistance.