圆柱形谐振式MPCVD装置的模拟及调控

圆柱形谐振式MPCVD装置的模拟及调控

刘繁, 翁俊, 汪建华, 周程

Simulation and Control of Cylindrical Resonant MPCVD Device

LIU Fan, WENG Jun, WANG Jian-hua, ZHOU Cheng

表面技术 . 2021, (4): 184 -190 . DOI: 10.16490/j.cnki.issn.1001-3660.2021.04.017