沉积压力对磁控溅射La-Ti/WS2复合薄膜结构和摩擦学性能的影响

蔡海潮, 薛玉君, 王景华, 叶军, 贺江涛

Effect of Deposition Pressure on Structure and Tribological Properties of La-Ti/WS2 Composite Films Prepared by Magnetron Sputtering

CAI Hai-chao, XUE Yu-jun, WANG Jing-hua, YE Jun, HE Jiang-tao

表面技术 . 2020, (7): 168 -174 . DOI: 10.16490/j.cnki.issn.1001-3660.2020.07.021