强磁场对碱液腐蚀制备多晶硅表面织构的影响
宋建宇, 肇伟懿, 齐东丽, 贾子凡, 沈龙海, 李想
Effect of High Magnetic Field on Surface Texture of Alkaline Solution Corroded Polysilicon
SONG Jian-yu, ZHAO Wei-yi, QI Dong-li, JIA Zi-fan, SHEN Long-hai, LI Xiang
表面技术
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2020, (7): 120
-125
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DOI: 10.16490/j.cnki.issn.1001-3660.2020.07.015