基于非晶碳膜压阻效应的MEMS压力传感器研究
马鑫, 张琪, 郭鹏, 同笑珊, 赵玉龙, 汪爱英
MEMS Pressure Sensor Based on Piezoresistive Effect of Amorphous Carbon Film
MA Xin, ZHANG Qi, GUO Peng, TONG Xiao-shan, ZHAO Yu-long, WANG Ai-ying
表面技术
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2020, (6): 60
-67
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DOI: 10.16490/j.cnki.issn.1001-3660.2020.06.007