氮气流量对C、N共掺杂NiCr合金薄膜微观结构和电性能的影响

赖莉飞, 王金霞, 鲍明东

Effect of Nitrogen Flow Rate on Microstructure and Electrical Properties of C and N Co-doped NiCr Alloy Thin Film

LAI Li-fei, WANG Jin-xia, BAO Ming-dong

表面技术 . 2019, (12): 131 -139 . DOI: 10.16490/j.cnki.issn.1001-3660.2019.12.015