ZnO掺杂对ZnSb相变薄膜结构和电学特性的影响

吴德振, 周细应, 邱小小, 郝艳, 刘银杰

Effect of doping ZnO on the Structure and Electrical Characteristics of ZnSb Phase Change Film

WU De-zhen, ZHOU Xi-ying, QIU Xiao-xiao, HAO Yan, LIU Yin-jie

表面技术 . 2019, (7): 347 -352 . DOI: 10.16490/j.cnki.issn.1001-3660.2019.07.040