低转速下多弧离子镀制备的Mo-Ti-Al-N超晶格硬质涂层的微结构及背散射谱分析
王泽松, 梁枫, 项燕雄, 李松权, 田灿鑫, 邹长伟
Analysis on Microstructure and Backscattering Spectroscopy of Superlattice Mo-Ti-Al-N Hard Coatings Prepared by Multi-arc Ion Plating at Low Rotation Speed
WANG Ze-song, LIANG Feng, XIANG Yan-xiong, LI Song-quan, TIAN Can-xin, ZOU Chang-wei
表面技术
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2019, (4): 160
-167
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DOI: 10.16490/j.cnki.issn.1001-3660.2019.04.023
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