高能离子刻蚀前处理对AlTiSiN涂层切削性能的影响

梁加刚, 许昌庆, 王标, 高营, 蔡飞, 张世宏

Effects of High Energy Ion Cleaning Pre-treatment on Cutting Performance of AlTiSiN Coatings

LIANG Jia-gang, XU Chang-qing, WANG Biao, GAO Ying, CAI Fei, ZHANG Shi-hong

表面技术 . 2019, (4): 145 -151 . DOI: 10.16490/j.cnki.issn.1001-3660.2019.04.021