目的 提高AlTiSiN涂层与刀具基材的结合强度，降低涂层表面的粗糙度，减少切削过程中涂层的剥落，改善涂层刀具的切削寿命。方法 采用离子源增强的多弧离子镀设备刻蚀清理基体材料，并制备AlTiSiN涂层。利用X射线衍射仪（XRD）、扫描电镜（SEM）、粗糙度仪、划痕仪和铣削实验探讨涂层沉积前不同Ar离子刻蚀清洗工艺对AlTiSiN涂层结构、膜基结合力和涂层表面形貌的的影响，探究不同刻蚀清洗工艺对涂层刀具切削机理和切削性能的影响。结果 AlTiSiN涂层的相结构主要由(Al,Ti)N固溶体相组成，涂层沿着基体呈现柱状生长。随着高能Ar离子刻蚀电流由40 A增加至100 A，涂层的表面粗糙度降低，Ra值由140 nm降至69 nm，Sq值由226 nm降至117 nm；涂层与基体之间的结合强度增加，Lc2由41 N增加至52 N；切削加工DC53模具钢结果显示，当清洗电流增加至100 A，涂层的剥落几率降低，涂层刀具的切削寿命增加，由11 m增加至23 m。结论 高能离子刻蚀前处理过程可有效增加涂层与基体之间的结合强度，降低涂层表面粗糙度，进而提高涂层刀具的切削寿命。刻蚀清洗所用电流强度越大，清洗效果越好，刀具涂层切削性能提高越明显。

This work aims to improve the adhesive strength between AlTiSiN coating and tool substrate, reduce the roughness of coating surface, decrease the coating peelings during the cutting, and increase the cutting life of coated tool. The substrate materials were cleaned by ion source enhanced multi-arc ion plating equipment to prepare AlTiSiN coatings. X-ray diffraction (XRD), scanning electron microscopy (SEM), roughness tester, scratch tester and milling cutting tests were adopted to explore the effect of different Ar+ ion cleaning processes on structure, adhesion of the film to the substrate and coating surface morphology of AlTiSiN coating before deposition and investigate the effect of different cleaning processes on coating cutting mechanism and properties. The phase structure of AlTiSiN coating was mainly composed of (Al,Ti) N solid solution phase, and the coatings showed columnar growth along substrate. With the increase of etching currents from 40 A to 100 A during high energy Ar ion etching pretreatment, the surface roughness Ra value of coating decreased from 140 nm to 69 nm, and the Sq value decreased from 226 nm to 117 nm. The adhesion strength Lc2 between coatings and substrates increased from 41 N to 52 N. The results of cutting against DC53 mold results showed that the coating peeling rate reduced and the cutting life of coated tools increased from 11 m to 23 m as the etching currents increased from 40 A to 100 A. The high-energy ion etching pretreatment can effectively increase the adhesive strength between coatings and substrates and reduce the coating surface roughness, so as to improve the service life of coated tools. In the cleaning process, the greater etching current intensity results in the better cleaning effect, and the better cutting performance of the coated tools.