脉冲偏压对电弧离子镀TiCN薄膜组织结构的影响

刘恋, 石倩, 代明江, 匡同春, 林松盛, 郭朝乾, 李洪, 苏一凡

Effects of Pulsed Bias on Microstructure of TiCN Films by Arc Ion Plating

LIU Lian, SHI Qian, DAI Ming-jiang, KUANG Tong-chun, LIN Song-sheng, GUO Chao-qian, LI Hong, SU Yi-fan

表面技术 . 2018, (9): 199 -205 . DOI: 10.16490/j.cnki.issn.1001-3660.2018.09.026