不同掺杂对类金刚石薄膜的影响

不同掺杂对类金刚石薄膜的影响

张书姣, 吴艳霞, 朱丽楠, 唐宾, 刘颖

Effects of Different Doping on Diamond-like Carbon Films

ZHANG Shu-jiao, WU Yan-xia, ZHU Li-nan, TANG Bin, LIU Ying

表面技术 . 2018, (9): 193 -198 . DOI: 10.16490/j.cnki.issn.1001-3660.2018.09.025