目的 研究单掺Si和共掺Ag、Si对类金刚石薄膜的结构、摩擦学性能和耐腐蚀性能的影响。方法 以高纯石墨靶、石墨与金属复合靶、Si靶作为靶材，采用射频增强磁控溅射技术制备不同掺杂种类的薄膜。通过XPS、拉曼光谱仪对薄膜的化学组成和结构进行分析，通过纳米压痕仪、摩擦磨损试验机、电化学工作站等，对薄膜的力学性能、摩擦学性能及耐腐蚀性能进行了系统研究。结果 Si元素单掺DLC会引起薄膜中sp3 C含量增加。Ag、Si共掺DLC后，由于Ag以金属相分布在薄膜中，并促进sp2相的形成，导致sp3 C含量降低。掺杂元素后的DLC薄膜，硬度下降，但韧性提高，其中Ag、Si共掺的DLC薄膜的弹性恢复系数达到79%。此外，Ag、Si共掺DLC薄膜在多种气氛（Ar、O2、N2）中都具有优异的摩擦学性能，磨损寿命均超过30 min，其中在N2气中的摩擦系数最低（<0.1），并在NaCl溶液中的腐蚀电流密度比304不锈钢基体降低了近2个数量级，具有良好的耐腐蚀性。结论 Si与Ag共掺DLC薄膜较Si单掺薄膜具有更好的摩擦环境适应性和耐腐蚀性能。

The work aims to study the effects of Si-doping and (Si,Ag)-codoping on structure, tribological properties and corrosion resistance of diamond like carbon (DLC) films. With high purity graphite target, graphite & metallic composite target and Si target as targets, the films containing different doped elements were prepared by radio frequency (RF) enhanced magnetron sputtering technology. Chemical composition and structure of the films were analyzed by XPS and Raman spectrometer. Mechanical property, tribological properties and corrosion resistance of the films were systematically characterized by nano-indentation tester, ball-on-disc tribometer and electrochemical workstation, respectively. Doping of Si into DLC films could cause sp3 C content to increase. Codoping of Si and Ag into DLC films could cause sp3 C content to decrease as Ag was distributed in the film in the form of metallic phase and formation of the sp2 phase was promoted. The film hardness decreased with the doping of elements while its toughness was improved, and elastic recovery rate of the films co-doped with Ag and Si was 79%. In addition, the DLC films co-doped with Si and Ag exhibited excellent tribological properties, wear life of the films exceeded 30 min in different atmosphere (Ar,O2,N2), friction coefficient of the films was the lowest (<0.1) in N2, corrosion current density of the films decreased by nearly 2 orders of magnitude, and the films had good corrosion resistance in NaCl solution. Compared with Si-doped DLC films, the films co-doped with Si and Ag exhibit better friction environment self-adaption and corrosion resistance.