共溅射法制备AZO薄膜及其光电性能的研究
何双赐, 钟志成, 魏彦锋, 汪竞阳
Preparation and Opto-Electrical Properties of Co-sputtered AZO Thin Films
HE Shuang-ci, ZHONG Zhi-cheng, WEI Yan-feng, WANG Jing-yang
表面技术
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2018, (5): 233
-238
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DOI: 10.16490/j.cnki.issn.1001-3660.2018.05.036
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