原子力显微镜和白光干涉仪在表面材料测试中的应用研究

郭志峰, 郭昭华, 王永旺, 陈东, 张云峰

Application of Atomic Force Microscope and White Light Interferometer in Surface Material Tests

GUO Zhi-feng, GUO Zhao-hua, WANG Yong-wang, CHEN Dong, ZHANG Yun-feng

表面技术 . 2018, (1): 254 -260 . DOI: 10.16490/j.cnki.issn.1001-3660.2018.01.040