目的 验证原子力显微镜和白光干涉仪分别在表面材料测试中的分辨率及其在不同类型表面材料测试中的适用性。方法 分别采用原子力显微镜和白光干涉仪，对不同厚度级别的ZnO薄膜、石墨烯、磨斑等几种不同类型的表面材料进行了具体的测试研究。结果 白光干涉仪10×镜头和50×镜头及原子力显微镜皆可以准确地测试百纳米级别的ZnO薄膜厚度，测得的膜厚分别为148.668、123.354、111.648 nm。原子力显微镜也可以准确地测出十纳米级别的ZnO薄膜厚度，测得的膜厚仅为6.152 nm，而白光干涉仪则不能测试出十纳米级别的ZnO薄膜厚度。原子力显微镜可以准确地测试出石墨烯片的大小、厚度和层数等三维数据，测得的厚度为0.665 nm左右，层数为单层或双层，而白光干涉仪则没有如此高的分辨率。白光干涉仪可以准确地测试出磨斑的宽度、深度等三维数据，测得的磨斑深度为4.245 μm，而原子力显微镜则不适合测试表面如此粗糙的样品。结论 原子力显微镜适合于测试相对光滑的表面材料的三维形貌和数据，如测试十纳米级别以上的薄膜厚度、超薄石墨烯片厚度和层数。白光干涉仪则适合于测试相对粗糙的表面材料的三维形貌和数据，如测试百纳米级别以上的薄膜厚度、微米级别磨痕深度等。

The work aims to test resolution of atomic force microscope and white light interferometer in surface material tests, and corresponding applicability to tests of various surface materials. Several surface materials of different thickness, including ZnO film, graphene and wear scar, were tested with the atomic force microscope and white light interferometer. ZnO film thickness above 100 nm could be measured accurately with 10× and 50× white light interferometers as well as atomic force microscope, measured film thickness was 148.668 nm, 123.354 nm and 111.648 nm, respectively; ZnO film thickness above 10 nm could be measured accurately with atomic force microscope, measured film thickness was 6.152 nm, but white light interferometer could not measure the thickness. 3D data such as size, thickness, and number of layers of graphene sheet could be measured accurately with atomic force microscope, measured thickness was nearly 0.665 nm, number of layers of graphene was 1~2, but white light interferometer had not such high resolution; 3D data such as width and depth of wear scar could be measured accurately with white light interferometer, the depth of wear scar was 4.245 μm, but atomic force microscope could not be used to test such rough surfaces. Atomic force microscope is suitable for testing 3D morphology and data of relatively smooth surface materials, such as film thickness above 10nm, thickness and number of layers of graphene sheets; white light interferometer is suitable for testing 3D morphology and data of relatively smooth surface materials, such as film thickness above 100 nm and depth of wear track above 1 μm.