电磁场辅助HFCVD制备高场发射性能薄膜

李嘉馨, 蒋云露, 胡乃修, 王一佳, 魏秋平, 余志明, 马莉, 周科朝

Carbon Films of High Field Emission Properties Farbricated by Electromagnetic Field Assisted by HFCVD

LI Jia-xin, JIANG Yun-lu, HU Nai-xiu, WANG Yi-jia, WEI Qiu-ping, YU Zhi-ming, MA Li, ZHOU Ke-chao

表面技术 . 2017, (8): 145 -152 . DOI: 10.16490/j.cnki.issn.1001-3660.2017.08.024