离子源功率对a-C:H(Al)薄膜结构及性能的影响

赵凤丽, 代明江, 林松盛, 许伟, 侯慧君

Influence of Ion Source Power on Structure and Properties of a-C:H(Al) Films

ZHAO Feng-li, DAI Ming-jiang, LIN Song-sheng, XU Wei, HOU Hui-jun

表面技术 . 2017, (6): 143 -150 . DOI: 10.16490/j.cnki.issn.1001-3660.2017.06.022