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李春伟, 田修波, 巩春志, 许建平

Microstructure and Thickness Uniformity of Vanadium Films on Concave Object at Different Target-Substrate Distance by HIPIMS

LI Chun-wei, TIAN Xiu-bo, GONG Chun-zhi, XU Jian-ping

表面技术 . 2016, (7): 122 -127 . DOI: 10.16490/j.cnki.issn.1001-3660.2016.07.021