脉冲偏压对复合离子镀(Ti,Cu)N 薄膜结构与性能的影响

张臣, 黄美东, 陈泽昊, 王萌萌, 王宇

Effects of Pulsed Bias on the Structure and Properties of(Ti,Cu)N Coatings Prepared by Hybrid Ion Plating

ZHANG Chen, HUANG Mei-dong, CHEN Ze-hao, WANG Meng-meng, WANG Yu

表面技术 . 2015, (10): 22 -26 . DOI: 10.16490/j.cnki.issn.1001-3660.2015.10.004