目的 了解 Au/ Ni/ Cu 多层金属薄膜在热带海洋气候下的失效机制,为研究电子元器件表面腐蚀失效的早期预警提供参考。 方法 采用磁控溅射法在 p 型单晶 Si(100)基片上沉积 Au/ Ni/ Cu 薄膜,在热带海洋气候环境下进行时效实验,采用原子力显微镜及俄歇电子能谱对薄膜失效表面与界面结构微观变化进行研究。 结果 时效实验初期,Au/ Ni/ Cu 薄膜表面发生了 Au 原子聚集,形成了不再连续的岛状结构,岛与岛之间产生了表面微裂纹。 随着时效时间的延长,表面形成腐蚀洞,腐蚀洞附近有 Ni 和 Cu扩散至 Au 层表面。 时效时间进一步延长后,腐蚀洞的数量增加,面积增大,此时样品处于腐蚀末期;与此同时,在未产生腐蚀洞的区域,Au/ Ni/ Cu 薄膜界面未出现明显粗化。 结论 Au/ Ni/ Cu 薄膜在热带海洋气候中的失效主要是通过表面产生的腐蚀洞进行的。

Objective To investigate the failure mechanism of Au/ Ni/ Cu multilayer film in the tropical marine climate, so as to provide reference for the research on the early warning of corrosion failure in electron components. Methods In this study, magnetron sputtering was used to develop Au/ Ni/ Cu thin film on p type single crystal Si(100) substrate. The surface and interface structure changes of Au/ Ni/ Cu thin films in the tropical marine climate were studied using atomic force microscopy (AFM) and Auger electron spectroscopy (AES). Results In the early stage of aging treatment, Au atoms aggregated on the Au/ Ni/ Cu thin film surface and formed discontinuous island structure and micro-cracks around the islands. With the increase of aging time, Ni atoms and Cu atoms diffused to the surface of the Au layer near the corrosion holes formed in the films. As the aging time increased further, the number of the corrosion holes increased, and the corrosion hole area was enlarged, at this time the samples were in the terminal stage of corrosion. In the meantime, no obvious coarsening was observed at the interface of Au / Ni / Cu thin film in the areas away from the corrosion holes. Conclusion The failure of Au / Ni / Cu thin film in tropical marine climate mainly proceeded through surface corrosion hole.