目的 优化聚晶金刚石( PDC) 薄膜的合成工艺参数。 方法 以保温时间、冷却时间、烧结温度为变量,设计 PDC 薄膜合成正交实验,以旁热式组装合成块进行烧结,测定 PDC 烧结成品的硬度、磨耗比、电阻值,确定每组烧结品的完整数,并通过综合平衡法对正交实验结果进行分析。 结果 保温时间、冷却时间、烧结温度在不同程度上影响 PDC 的综合质量。 结论 最佳工艺参数为:合成温度 1350 ℃ ,加热时间 5 min,冷却时间 11 min。

Objective To optimize the parameters for the synthesis process of polycrystalline diamond ( PDC) films. Methods Using the holding time, cooling time and sintering temperature as variables, orthogonal experiments were designed for the synthesis of PDC) film. The side-assembling block was used for thermal sintering, the hardness, wear ratio and the resistance value were measured for the sintered finished PDC, and the amounts of intact products were determined for each group of sintered products, and the orthogonal experimental results were analyzed by the overall balance method. Results Holding time, cooling time and sintering temperature affected the overall quality of PDC to varying degrees. Conclusion The optimal parameters were: synthesis temperature 1350 ℃ , heating time 5 min, cooling time 11 min.