目的 研究磁控溅射工艺参数,包括溅射功率、溅射时间,对 TiN 涂层轴承钢表面性能的影响。方法 采用磁控溅射技术,固定其他工艺参数不变,分别以溅射功率和溅射时间为变量,在轴承钢 GCr15表面镀制 TiN 膜层,并测定硬度,进行摩擦磨损试验。 结果 固定溅射功率为 200 W, 随镀膜时间的延长,硬度和耐磨性呈递减趋势, 镀膜时间为 5 ~ 10 min 时, 硬度值达 345 . 23 ~ 353 . 88 HV, 摩擦磨损量为2 . 9 ~ 3 . 4 mg。 固定镀膜时间为 30 min,随着溅射功率从 70 W 增大至 200 W,硬度与耐磨性也呈递减趋势,溅射功率为 100 W 时,硬度值可达 577 . 91 HV,摩擦磨损量为 0 . 9 mg。 结论 溅射功率的影响占主导地位,且溅射功率不宜偏高。 欲提升材料表面硬度和耐磨性能,溅射功率取 100 W,镀膜时间取 30 min 最为适宜。

Objective To investigate the influence of magnetron sputtering parameters including sputtering power and sputtering time on surface properties. Methods The hardness tests and friction tests were carried out for TiN-coated bearing steel. Results Tests showed that hardness and wear resistance declined with the increase of deposition time, and when the sputtering power was 200 W, with a deposition time of 5 ~ 10 minutes, the hardness value reached 345. 23 ~ 353. 88 HV, and the wearing capacity was 2. 9 ~ 3. 4 mg; The hardness and wear resistance declined with the increase of sputtering power in the range of 70 ~ 200 W, the hardness value reached up to 577. 91 HV, and the wearing capacity was 0. 9 mg, when the deposition time was 30 minutes. Conclusion It was concluded from the testing results that the sputtering power was the predominant influencing factor. In order to improve the surface friction properties and hardness for bearing steels, the sputtering power should not be too high, and a sputteringpower of 100 W and a deposition time of 30 minutes was the most suitable sputtering condition.