通过阐述 XPS 测试原理及工作特点,讨论其在材料表面研究中的具体应用。 通过光电子谱峰位置、形状和强度,可以分析元素价态、含量。 角分辨 XPS 可以检测超薄样品表面的化学状态,成像 XPS 可以显示样品表面的元素和价态分布,从而进行微区分析。 利用氩离子刻蚀进行深度剖析,可以研究样品化学状态随深度的变化关系。

This paper briefly reviewed the principle and characteristics of XPS in surface analysis, and described its specific application in material research. The position, shape and intensity of XPS peaks can be used for determining the chemical valence and content of elements. Ultrathin sample can be analyzed by the angle-resolved XPS method. Imaging XPS could show the distribution of element on the surface of samples and its chemical valence. Through depth profiling using argon-ion etching, the variation of sample chemical state with depth can be revealed.