目的 根据当前活塞环陶瓷膜工艺中存在的问题,对渗陶电源进行改进,使处理的活塞环达到工业应用要求的同时提高处理效率。 方法 分析用 PECVD 方法制备陶瓷膜工艺中影响成膜的主要因素,以这些因素为依据,通过改变渗陶电源放电的各种参数,比较在不同参数下处理的效果。 结果 在最佳组合的放电参数下,这种改进后电源在活塞环表面的成膜效果与传统电源相当,同时,处理的效率得到了提高。 结论 非对称脉冲式电源可以代替传统高功耗的射频电源使活塞环表面陶瓷化。

Objective Based on the problems existing in the current piston ring ceramic membrane process, this paper proposed a method to improve the infiltration pottery power supply, to help the processing of piston ring to meet the requirements of industrial application, and meanwhile to improve the processing efficiency. Methods The main factors affecting the surface of piston ring in the preparation of ceramic membrane process were discussed by PECVD. Based on these factors, the effects of processing under different parameters for infiltration pottery power supply discharging were compared. Results Under the optimal combination of discharge parameters, the processing effect by this kind of improved power supply was as good as the traditional power supply, and the processing efficiency was also improved. Conclusion Asymmetric pulse power supply can replace traditional power supply with high power consumption for making the piston ring surface ceramic.