PCVD 法制备 Fe-6 . 5 %Si 高硅钢片的工艺研究

周磊, 潘应君, 徐超, 彭骏松, 张改璐

表面技术 ›› 2013, Vol. 42 ›› Issue (3) : 88-90.

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表面技术 ›› 2013, Vol. 42 ›› Issue (3) : 88-90.
应用技术

PCVD 法制备 Fe-6 . 5 %Si 高硅钢片的工艺研究

  • 周磊, 潘应君, 徐超, 彭骏松, 张改璐
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Study on Fe-6 . 5 %Si Steel Slice Prepared by PCVD

  • ZHOU Lei, PAN Ying-jun, XU Chao, PENG Jun-song, ZHANG Gai-lu
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摘要

为制备 Fe-6 . 5% Si 高硅钢片,先利用 PCVD 技术在 0 . 2 mm 厚的纯铁片表面沉积硅,再进行高温扩散。 通过正交实验分析了沉积硅的工艺参数对表层硅含量的影响,并研究了扩散参数对截面硅含量分布的影响。 结果表明:以 10% SiH4+90% Ar 作为渗源气,在 500 ℃ 下沉积 20 min,所得样品的表层硅含量高达 40 . 5% ;然后在工业纯氢气的保护下,于 1050 ℃ 保温 60 min,可获得满足要求的 Fe-6 . 5% Si 高硅钢片。

Abstract

Fe-6 . 5 % Si high silicon steel sheet was available after silicon was deposited on the surface of plain pure steel sheet with 0 . 2 mm heavy through PCVD, then treated at a high temperature. Analyzed the impact of deposition process parameters on the surface of the silicon content by orthogonal test, the relationship between diffusion parameters and the cross-sectional distribution of silicon content was studied. The results show that 40 . 5 % of the surface silicon is obtained by the 10 % SiH4and 90 % Ar as the seepage source, 500 ℃ deposition for 20 min. Meeting the requirements of Fe-6 . 5 % Si high silicon steel sheet is obtained in the protection of industrial pure H2at 1050 ℃ insulating for 60 min.

关键词

PCVD; 6 . 5% Si 硅钢片; 渗硅; 扩散处理

Key words

PCVD; 6 . 5 % Si steel sheet; siliconizing; diffusion treatment

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周磊, 潘应君, 徐超, 彭骏松, 张改璐. PCVD 法制备 Fe-6 . 5 %Si 高硅钢片的工艺研究[J]. 表面技术. 2013, 42(3): 88-90
ZHOU Lei, PAN Ying-jun, XU Chao, PENG Jun-song, ZHANG Gai-lu. Study on Fe-6 . 5 %Si Steel Slice Prepared by PCVD[J]. Surface Technology. 2013, 42(3): 88-90

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