采用中频孪生靶磁控溅射技术,在不锈钢和铝基体上沉积出 ZrN / Zr 薄膜,表征了薄膜的厚度、色度及表面形貌,研究了氮气流量对 ZrN / Zr 薄膜的沉积速率和色度的影响。 结果表明:随着氮气流量的增加,薄膜的沉积速率先降低,后升高,氮气流量在 2 . 5 X10^-10~ 3 . 5 X10^-10m³/ s 范围内时对薄膜的沉积速率影响很小;随着氮气流量的变化,薄膜的颜色呈现规律性的变化,在氮气流量 2 . 5 X10^-10~ 3 . 5 X10^-10m³/ s 范围内,可以制备出色彩亮丽的仿金薄膜 ZrN,且膜层致密。英文摘要

The ZrN / Zr films were deposited on stainless steel and aluminum substrates by mid-frequency twin-targets magnetron sputtering technology. The thickness, chromaticity, and surface morphology of ZrN / Zr films were characterized. And the influences of nitrogen flow on deposition rate and chromaticity of ZrN / Zr films were studied. The results show that the deposition rate decreases first with the increase of nitrogen flow, then increases. Nitrogen flow between 2 . 5 X 10^-10and 3 . 5 X 10^-10m³/ s, the influence of nitrogen flow on deposition rate is very small . With the increase of nitrogen flow, the color of the film changes regularly. In the range of 2 . 5 X10^-10~ 3 . 5 X10^-10m³/ s, the gold ZrN films are bright and density.