为了研究等离子体中离子能量的分布规律,基于栅网式离子能量测试原理,采用离子光学模拟软件 Simion7 . 0 ,对四栅网离子能量分析仪中网格大小和网格间距对离子能量测量结果的影响进行了理论分析。分析结果表明,当离子能量为 800 eV 左右时,网格尺寸的大小会影响离子能量的测量精度,网格间距的大小对离子能量的测量结果几乎不产生影响。 该研究结果对栅网式离子能量测试装置的设计及网格参数的优化具有重要的理论和实践指导意义。

In order to study the ion energy distribution regulation in plasma, the ion energy test principle of grid ion energy analyzer were introduced. The mesh size and the grid spacing of four-grid ion analyzer were respectively simulated by ion optical simulation software Simion7 . 0 . Theoretical analysis results show that when the ion enery is about 800 eV, the mesh size will affect ion energy measurement precision, grid spacing almost do not affect ion energy measurement results. This research results is of important theoretical and practical significance on grid type ion energy testing device design and grid optimization of parameters.