为在物理气相沉积过程中获得理想的晶粒尺寸,介绍了一种精确控制纳米晶粒尺寸的微观控制方法,即用光的干涉方法控制能量场分布。利用MATLAB的循环计算能力计算光的矢量叠加,仿真光的干涉,分别对杨氏干涉、三光源干涉以及多光源不同排布的干涉进行分析。经过分析可知:3个或3个以上的光源线性排列时,得到的条纹是将两光源的条纹打碎;而多个光源按正多边形排列的干涉,规律排布区域出现在光源围成的区域中间,3个、4个及6个光源规律排布区域中加强点的间距分别为λ√3,λ√2和2λ;若要得到1cm2 规律排布区域,3个光源与规律排布区域中心的距离为0.1m,4个光源则为1m。

In order to obtain the ideal grain size in PVD process, a precise control of nano-grain size of micro-control method, and precise control of grain size of the micro-control method was introduced. Using MATLAB’s powerful ability to circulation calculated, and using vector overlay character of light, the interference of light was simulated. the young’s interference, the three-source interference and the multi-sources interference were researched and analyzed. By analysis the rule of stripes of interference is got. If the light sources are in a linear arrangement, the stripes will be chaotic. And if the light sources are arranged in regular polygon, the stripes in middle of sources are regular. And the strengths distance of three sources is λ√3, four is λ√2, six is 2λ. If the size of regular area is 1 cm2, the distance of source is 0.1m (threesources) and 1 m (foursources).