采用不同偏压,在201不锈钢表面进行多弧离子镀TiN 薄膜,研究了偏压对薄膜表面形貌、硬度、相结构及耐蚀性的影响。研究表明:薄膜表面存在着许多液滴颗粒,随着偏压的增加,液滴减少,但过大的偏压会使表面出现凹坑;薄膜的显微硬度随偏压的升高先增大后减小,偏压为-200V 时的本征硬度为2195HV;在3.5%的NaCl溶液中,TiN 薄膜试样的耐蚀性比基体略有提高,在1mol/L的H2SO4 溶液中,偏压-100V 制备的试样耐蚀性最好,比基材提高了475倍。

TiN coatings of different negative bias voltage were deposited on 201 stainless steel by multi-arc ion plating(MAIP). The effect of negative bias voltage on the surface microstructure, hardness, phase structure and the corrosion resistance of the coatings was investigated. Results showed that there were many droplet particles in the surface. When the negative bias voltage increased, the number and size of droplets decreased; But when the substrate bias increased to a certain value, there appeared some pits. The hardness increased at first but decreased later with the increasing of the negative bias voltage. When the negative bias voltage was-200V, the intrinsic hardness of TiN film was 2 195HV. Compared with 201 stainless steel,the corrosion resistance of TiN coatings samples was improved slightly in 3.5% NaCl solution; In l mol/L H2SO4 solution, the corrosion resistance of the-100V sample was best; Compared with untreated 201 stainless steel, the corrosion resistance of the-100V coating sample was increased 475 times.