目的 揭示磨削参数对氮化硅亚表面损伤深度的影响规律,为磨削加工中降低损伤深度、提高生产效率提供指导。方法 建立氮化硅陶瓷磨削力和裂纹扩展仿真模型,并提出一种基于这2个仿真模型的氮化硅陶瓷磨削亚表面损伤深度预测方法。通过超精密平面磨床,对氮化硅陶瓷片进行磨削试验研究,系统探索砂轮线速度（vs）、磨削深度（ap）、工件进给速度（vw）对磨削后亚表面损伤深度的影响规律。通过扫描电镜（SEM）观测磨削后氮化硅陶瓷亚表面损伤的特征。通过对试验数据进行分析,优化氮化硅磨削亚表面损伤深度的数学预测模型。结果 经试验验证,2个仿真模型均具有较高的精度,基于这2个仿真模型的氮化硅陶瓷磨削亚表面损伤深度预测方法的最大误差在9%以内。试验结果表明,损伤深度随着工件进给速度和磨削深度的增加而增加,随着砂轮线速度的增加而减小,且磨削深度和砂轮线速度对损伤的影响较大。优化后的氮化硅磨削亚表面损伤深度数学模型预测值与实测值的平均偏差率为8.9%,将最大绝对误差控制在11%以内。结论 研究结果为氮化硅陶瓷的高效、低损伤磨削提供了理论依据,并为相关工艺的优化提供了理论支持。
Abstract
The work aims to reveal the effect of grinding parameters on the sub-surface damage depth of silicon nitride, to guide the processing to reduce the damage depth and improve productivity. Firstly, simulation models were constructed for grinding force and crack propagation of silicon nitride ceramics. Based on the mechanical mechanism in the material removal process, combined with the performance parameters of silicon nitride ceramics, the finite element analysis method was used to simulate the stress distribution, material deformation, and crack initiation and propagation during the grinding process. On this basis, an innovative prediction method for the ground sub-surface damage depth of silicon nitride ceramics based on these two simulation models was proposed. This method combined the grinding force with the crack propagation process, fully considering various complex factors in the processing, and providing a theoretical basis for subsequent research. To verify the accuracy of the simulation models and the prediction method, the research team carried out grinding experiments on silicon nitride ceramic sheets with the help of an ultra-precision surface grinder. In the experiments, the effect laws of grinding wheel linear speed (vs), grinding depth (ap), and workpiece feed speed (vw) on the sub-surface damage depth after grinding were systematically explored. A scanning electron microscope (SEM) was used to carefully observe the sub-surface damage characteristics of the ground silicon nitride ceramics, capturing key information such as crack morphology, distribution, and propagation path. At the same time, in-depth analysis was conducted on the experiment data, and the mathematical prediction model for the ground sub-surface damage depth of silicon nitride was continuously optimized to make it more in line with the actual processing situation. The experiment results showed that the two constructed simulation models exhibited high accuracy. The maximum error of the prediction method for the ground sub-surface damage depth of silicon nitride ceramics based on these two models was controlled within 9%, which fully verified the effectiveness of the method. Further analysis of the experimental results found that the damage depth was significantly related to various grinding parameters: with the increase of workpiece feed speed and grinding depth, the grinding force increased, leading to a corresponding increase in damage depth, while the increase of grinding wheel linear speed could shorten the contact time between abrasive grains and materials, reduce the single cutting force, and thus reduce the damage depth. In addition, the grinding depth and grinding wheel linear speed had a more significant impact on the damage, which required more attention in actual processing. The optimized mathematical model for the ground sub-surface damage depth of silicon nitride had an average deviation rate of 8.9% between the predicted values and the measured values, and the maximum absolute error was controlled within 11%, which greatly improved the accuracy of the prediction. The results of this study provide a solid theoretical basis for efficient and low damage grinding of silicon nitride ceramics. At the same time, it also offers strong theoretical support for the optimization of related processes and is of great significance for promoting the wide application of silicon nitride ceramics in the field of high-end equipment manufacturing.
关键词
氮化硅陶瓷 /
磨削力 /
亚表面损伤 /
有限元仿真 /
离散元仿真
Key words
silicon nitride ceramics /
grinding force /
sub-surface damage /
finite element simulation /
discrete element simulation
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基金
国家重点研发计划（2024YFB3410201）; 辽宁省教育厅重点项目（LJ212510153032）; 辽宁省科技厅博士启动基金（2025-BS-0485）
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