多孔羰基铁粉对磁性复合流体抛光的影响

王有良; 郭毅; 段小超; 于璞垚; 张文娟; 尹新城

doi:10.16490/j.cnki.issn.1001-3660.2026.01.001

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表面技术 ›› 2026, Vol. 55 ›› Issue (1) : 1-12. DOI: 10.16490/j.cnki.issn.1001-3660.2026.01.001

精密与超精密加工

多孔羰基铁粉对磁性复合流体抛光的影响

王有良^a,b, 郭毅^a,b, 段小超^a,b, 于璞垚^a,b, 张文娟^c, 尹新城^a,b

作者信息 +

Effect of Porous Carbonyl Iron Powder on Polishing of Magnetic Compound Fluid

WANG Youliang^a,b, GUO Yi^a,b, DUAN Xiaochao^a,b, YU Puyao^a,b, ZHANG Wenjuan^c, YIN Xincheng^a,b

Author information +

文章历史 +

摘要

目的解决磁性复合流体（Magnetic compound fluid, MCF）在抛光时水分流失导致抛光性能降低,从而增加抛光成本的问题。方法提出一种基于多孔羰基铁粉（Porous carbonyl iron powder, PCIP）的MCF抛光液,探讨羰基铁粉的多孔结构在MCF水分保持、磨粒分布优化等方面的作用。首先,采用点蚀法制备多孔结构羰基铁粉,探究反应时间对物质结构、微观形貌、孔径和磁性能的影响规律;然后,通过抛光实验探究含多孔羰基铁粉的MCF对表面粗糙度和材料去除率的影响规律。最后,通过构建抛光质量-抛光作用力-MCF状态-润湿性-抛光温度的内在联系,探究多孔羰基铁粉对水分的作用机理,研究多孔结构对磨粒分布的影响。结果通过控制反应时间,可在羰基铁粉表面制备出不同孔径的多孔结构,在3 h内,随着反应时间的增加,PCIP表面孔径和比表面积增大,磁性能下降,但其物质结构并未改变;采用含有PCIP-2的MCF2的抛光效果最优,在抛光60 min后,工件表面粗糙度由337 nm降至22 nm,下降率约为93.5%,相较于MCF0（含无多孔结构的羰基铁粉）,提高了4.9%,材料去除率从4.36×10⁸ μm³/min提升至6.65× 10⁸ μm³/min;MCF2抛光后的形貌状态保持良好,PCIP-2粉体表现出更好的亲水性,抛光区域的温升更小。结论多孔结构的储液和缓释性能维持了抛光时的润滑和冷却效果,延长了抛光液的使用寿命;通过镶嵌、固定等方式优化了磨粒分布,提升了MCF抛光性能。

Abstract

The work aims to develop a novel magnetic compound fluid (MCF) polishing tool incorporating porous carbonyl iron powder (PCIP) to investigate the role of porous structures in moisture retention and abrasive distribution optimization within MCF, thereby addressing issues of performance degradation and increased costs caused by water loss during polishing, which currently restricts MCF applications. Firstly, porous carbonyl iron powder was prepared through a pitting corrosion method. XRD, SEM, BET, and VSM techniques were employed to investigate the effects of reaction time on material structure, micromorphology, pore size, and magnetic properties of PCIP. Afterwards, polishing experiments were conducted with a stylus profilometer to examine the effect of PCIP-containing MCF on workpiece surface roughness and material removal rate during polishing. Finally, by establishing the intrinsic relationships among polishing quality, polishing force, MCF morphological state, wettability, and polishing temperature, the moisture retention mechanism of PCIP and the impact of porous structures on abrasive distribution were explored. Experimental results demonstrated that by controlling the reaction time, porous structures with different pore sizes could be fabricated on the surface of carbonyl iron powder. Within 3 hours, as the reaction time prolonged, the pore size and specific surface area of PCIP (porous carbonyl iron powder) gradually increased, while its magnetic properties correspondingly decreased. However, the structure of the carbonyl iron powder remained unchanged throughout this process. The polishing effect of MCF2 containing PCIP-2 was the best. After 60 min of polishing, the surface roughness of the workpiece decreased from 337 nm to 22 nm, with a reduction rate of about 93.5%, which was 4.9% higher compared to MCF0 (containing carbonyl iron powder without a porous structure), and the material removal rate increased from 4.36×10⁸ μm³/min to 6.65×10⁸ μm³/min. The positive pressure of MCF0 and MCF1 both decreased slowly with the increase of polishing time, and finally reached 4.8 N and 4.6 N respectively. The positive pressure of MCF2 reached a stable stage earlier and finally stabilized at 5.2 N. The positive pressure generated by MCF3 was relatively small, at 2.5 N. The shear forces of MCF0 to MCF3 after 10 minutes of polishing were 0.59 N, 0.89 N, 0.44 N and 0.11 N respectively. The morphology of MCF2 after polishing was well maintained, PCIP-2 powder showed better hydrophilicity, and the temperature rise in the polishing area was smaller. The contact angles of PCIP-0 to PCIP-3 were 94.21°, 29.86°, 20.52° and 118.32°, respectively. The temperature rises at three points of MCF2 were 3.1 ℃, 3.2 ℃ and 2.5 ℃, respectively. Compared with the other three MCFs, the temperature rise of MCF2 was lower. The overall temperature rise of the polishing area was 3 ℃. The temperature rises of MCF0, MCF1 and MCF3 were 3.6 ℃, 3.3 ℃ and 4.5 ℃, respectively. The order of temperature rise was MCF2<MCF1<MCF0<MCF3, and the final surface temperature of the workpiece after polishing with MCF2 was the lowest. The fluid storage and sustained-release properties of the porous structure maintains the lubrication and cooling effect during polishing and extends the service life of the polishing fluid. The distribution of abrasive particles is optimized through embedding, fixation and other methods, which improves the polishing performance of MCF.

导出引用

王有良, 郭毅, 段小超, 于璞垚, 张文娟, 尹新城. 多孔羰基铁粉对磁性复合流体抛光的影响[J]. 表面技术. 2026, 55(1): 1-12

WANG Youliang, GUO Yi, DUAN Xiaochao, YU Puyao, ZHANG Wenjuan, YIN Xincheng. Effect of Porous Carbonyl Iron Powder on Polishing of Magnetic Compound Fluid[J]. Surface Technology. 2026, 55(1): 1-12

中图分类号： TG580.692

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