针对高熵合金薄膜的研究现状，围绕成分设计、制备工艺、相结构、力学性能、高温性能、耐蚀性能等方面进行了讨论。分析了合金薄膜相结构受氮气流率、基底偏压、基底温度等工作参数影响的规律。其力学性能随着C、B、N等小半径非金属原子含量的增加而强化，文中从固溶强化理论角度进行了分析和解释。同时高熵合金薄膜展现出了优异的高温和耐蚀性能，在高温、强酸等极端条件下具有良好的稳定性。此外，高熵材料成分复杂且体系多样化，可通过高通量制备实现多组分材料的平行制备，为高通量筛选提供一个高效平台。针对未来可用于高熵合金高通量制备的几种技术进行了讨论。

High-entropy-alloy films were discussed from composition design, preparation process, phase structure, mechanical performances, high temperature resistance, corrosion resistance, etc. The effects of process parameters such as nitrogen flow rate, substrate bias and substrate temperature on phase structure were analyzed. The mechanical properties improved with the increase of non-metal atom with small radius (C, B, N, etc.) which was explained from the solid-solution strengthening theory. The high-entropy-alloy films possessed excellent high temperature performance and corrosion resistance, and showed a good stability under extreme conditions such as high temperature and strong acid. Moreover, the composition of high-entropy material was complex and diversified. Parallel preparation of multi-component materials could be achieved through high-throughput preparation, providing a platform for high-throughput screening. Several technologies able to be used for high-throughput preparation of high-entropy materials were discussed.